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Lecturer(s)
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Wágner Tomáš, prof. Ing. DrSc.
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Knotek Petr, doc. Ing. Ph.D.
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Course content
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Theoretical basis of semiconductors. Semiconducting elements and compounds. Purification methods. Crystal growth. Thin films deposition. Diffusion of dopants. Plasmochemical processes.
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Learning activities and teaching methods
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Monologic (reading, lecture, briefing)
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Learning outcomes
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Students will get knowledge on modern technologies and materials in production of semiconductors and integrated circuits.
Students will get knowledge on modern technologies and materials in production of semiconductors and integrated circuits.
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Prerequisites
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unspecified
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Assessment methods and criteria
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Written examination
Written and oral exam.
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Recommended literature
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Ing. J. Valíček. Průvodce po křemíkové technologii, 2000.
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J.G. Korvink, A.Greiner. Semiconductors for micro- and |nanotechnology..
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S. O. Kasap. Elektronické materiály a součástky. 2010.
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